한국정보디스플레이학회:학술대회논문집
- 2009.10a
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- Pages.1040-1043
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- 2009
Effect of Passivation Layer Properties on the Performance of Oxide TFTs
- Jeong, Byoung-Seong (OLED R&D Center, Samsung Mobile Display Co., LTD.) ;
- Park, Chang-Mo (OLED R&D Center, Samsung Mobile Display Co., LTD.) ;
- Kim, Mu-Gyeom (OLED R&D Center, Samsung Mobile Display Co., LTD.) ;
- Chung, Hyun-Joong (OLED R&D Center, Samsung Mobile Display Co., LTD.) ;
- Ahn, Tae-Kyung (OLED R&D Center, Samsung Mobile Display Co., LTD.) ;
- Heo, Seong-Kweon (OLED R&D Center, Samsung Mobile Display Co., LTD.) ;
- Jeong, Jong-Han (OLED R&D Center, Samsung Mobile Display Co., LTD.) ;
- Kim, Min-Kyu (OLED R&D Center, Samsung Mobile Display Co., LTD.) ;
- Park, Hye-Hyang (OLED R&D Center, Samsung Mobile Display Co., LTD.) ;
- Huh, Jong-Moo (OLED R&D Center, Samsung Mobile Display Co., LTD.) ;
- Mo, Yeon-Gon (OLED R&D Center, Samsung Mobile Display Co., LTD.) ;
- Kim, Hye-Dong (OLED R&D Center, Samsung Mobile Display Co., LTD.) ;
- Kim, Sang-Soo (OLED R&D Center, Samsung Mobile Display Co., LTD.)
- Published : 2009.10.12
Abstract
a-IGZO is an attractive material to make an AMOLED device with uniform TFT properties for use in a large size display. However, this material shows TFT properties that are very sensitive to water or hydrogen. Therefore, it is essential to control these critical factors during fabrication of the backplane in order to improve the TFT performance. In this paper, we report the effect of passivation layer properties on the performance of the oxide TFTs.