Modeling and Vibration Control of the Precision Positioning Stage with Flexible Hinge Mechanism

유연힌지형 정밀스테이지의 모델링 및 진동제어

This paper suggests a precision positioning control technique of a precision positioning stage with coupling effects. The precision positioning stage is supported by four flexible spring hinges and driven by two piezoelectric actuators. The dynamic characteristics of the precision positioning stage is modeled and identified by the FEM analysis. The dynamic characteristics of the stage are also identified by the frequency domain modeling technique based on the experimental data. Reliability of two modeling methods is examined by comparing the numerically and experimentally produced responses of the stage. This paper proposes a sliding mode control technique with integrator to improve the tracking ability of the precision positioning stage to the complex input signal using. To demonstrate the effectiveness of the proposed modeling schemes and control algorithm, experiment validations are performed.