대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

폴리디메틸실록산으로 제작된 경사 전극을 가진 2축 구동 스캐닝 미러의 설계 및 제작

Design and fabrication of 2-DOF scanning mirror with Polydimethylsiloxane sloped electrode

  • 진주영 (서울대학교 전기컴퓨터공학부) ;
  • 박재형 (이화여자대학교 물리학과) ;
  • 유병욱 (서울대학교 전기컴퓨터공학부) ;
  • 장윤호 (서울대학교 전기컴퓨터공학부) ;
  • 박일흥 (이화여자대학교 물리학과) ;
  • 김용권 (서울대학교 전기컴퓨터공학부)
  • Jin, J.Y. (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Park, J.H. (Department of Physics, Ewha Womans University) ;
  • Yoo, B.W. (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Jang, Yun-Ho (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Park, I.H. (Department of Physics, Ewha Womans University) ;
  • Kim, Y.K. (School of Electrical Engineering and Computer Science, Seoul National University)
  • 발행 : 2009.07.14
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

In this paper, we present a simple fabrication process for sloped electrodes in 2-degree of fredom(DOF) scanning micromirror employing pholydimethylsiloxane(PDMS). Using this process, quasi-conic figure electrode is successfully fabricated on the substrate. Simulation results show sloped electrodes decrease actuation voltage down to 22% compared with parallel plate type of electrodes having the same electrode area.

키워드