Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2009.07a
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- Pages.1268_1269
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- 2009
Effects of rapid thermal annealing on indium-zinc-oxide films
산화인듐아연 박막에 대한 급속 열처리 효과
- Kim, Won (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
- Uhm, Hyun-Seok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
- Bang, Jung-Hwan (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
- Park, Jin-Seok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University)
- 김원 (한양대학교 전자전기제어계측공학과) ;
- 방정환 (한양대학교 전자전기제어계측공학과) ;
- 엄현석 (한양대학교 전자전기제어계측공학과) ;
- 박진석 (한양대학교 전자전기제어계측공학과)
- Published : 2009.07.14
Abstract
This work shows the effect of rapid thermal annealing (RTA) on properties of indium-zinc oxide (IZO) thin films. The RTA temperatue was controlled between 300 and
Keywords