Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2009.07a
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- Pages.1246_1247
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- 2009
Effects of oxygen and hydrogen additives on electrical, optical, and structural properties of ZnO films
수소 및 산소 첨가에 따른 산화아연막의 전기적, 광학적, 구조적 물성
- Bang, Jung-Hwan (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
- Kim, Won (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
- Uhm, Hyun-Seok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
- Park, Jin-Seok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University)
- 방정환 (한양대학교 전자전기제어계측공학과) ;
- 김원 (한양대학교 전자전기제어계측공학과) ;
- 엄현석 (한양대학교 전자전기제어계측공학과) ;
- 박진석 (한양대학교 전자전기제어계측공학과)
- Published : 2009.07.14
Abstract
Effects of hydrogen and oxygen additives on structural, optical, and electrical properties of ZnO films were extensively examined. ZnO films were deposited using RF sputtering by varying the gas mixing ratio of
Keywords