대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2008년도 하계종합학술대회
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- Pages.393-394
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- 2008
기생 BJT의 DC 베이스저항 측정을 통한 MOSFET의 기판저항 추출
Extraction of Substrate Resistance in MOSFET Through DC Base Resistance Measurement of Parasitic BJT
- Jung, Dae-Hyoun (Department of Electronic Engineering, Hankuk University of Foreign Studies) ;
- Cha, Jun-Young (Department of Electronic Engineering, Hankuk University of Foreign Studies) ;
- Cha, Ji-Young (Department of Electronic Engineering, Hankuk University of Foreign Studies) ;
- Lee, Seong-Hearn (Department of Electronic Engineering, Hankuk University of Foreign Studies)
- 발행 : 2008.06.18
초록
This paper presents a new method to extract the substrate resistance by fitting current-dependent base resistance of parasitic BJT without a complex RF extraction method. The extracted substrate resistance values using the new method match well with those using the RF one, verifying the accuracy of the proposed DC technique.
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