Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2008.08a
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- Pages.146-146
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- 2008
Characteristics of SiON gate dielectrics for transparent oxide thin film transistor
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Shin, Han-Jae
(R&D Affairs Department, Gumi Electronics & Information Technology Research Institute)
;
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Han, Dong-Cheul
(R&D Affairs Department, Gumi Electronics & Information Technology Research Institute)
;
- Lee, Do-Kyung (R&D Affairs Department, Gumi Electronics & Information Technology Research Institute)
- Published : 2008.08.20
Abstract
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