Characteristics of SiON gate dielectrics for transparent oxide thin film transistor

  • Shin, Han-Jae (R&D Affairs Department, Gumi Electronics & Information Technology Research Institute) ;
  • Han, Dong-Cheul (R&D Affairs Department, Gumi Electronics & Information Technology Research Institute) ;
  • Lee, Do-Kyung (R&D Affairs Department, Gumi Electronics & Information Technology Research Institute)
  • 발행 : 2008.08.20