한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2008년도 제35회 하계학술대회 초록집
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- Pages.113-113
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- 2008
Electrical and structural properties of $HfO_2$ deposited by r.f magnetron sputter
- Hong, Young-Bin (School of Information and Communication Engineering, Sungkunkwan University) ;
- Roh, Yong-Ha (School of Information and Communication Engineering, Sungkunkwan University)
- 발행 : 2008.08.20