Proceedings of the SAREK Conference (대한설비공학회:학술대회논문집)
- 2008.11a
- /
- Pages.446-451
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- 2008
The Study on the experimental of a characteristic of temperature and humidity of atomizing water temperature variation in Air Washer
분무수 온도 변화에 따른 에어와셔의 온습도 특성에 관한 실험적 연구
-
Kim, Tae-Hyung
(Institute of Technology, Shinsung ENG Co., LTD.)
;
- Nam, Seung-Baeg (Institute of Technology, Shinsung ENG Co., LTD.) ;
- Ha, Jong-Pil (Institute of Technology, Shinsung ENG Co., LTD.) ;
- Jung, Jae-Hak (Institute of Technology, Shinsung ENG Co., LTD.) ;
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Cho, In-Soo
(Institute of Technology, Shinsung ENG Co., LTD.)
-
김태형
((주)신성이엔지 기술연구소)
;
- 남승백 ((주)신성이엔지 기술연구소) ;
- 하종필 ((주)신성이엔지 기술연구소) ;
- 정재학 ((주)신성이엔지 기술연구소) ;
-
조인수
((주)신성이엔지 기술연구소)
- Published : 2008.11.21
Abstract
Air washer remove dust on the air and use for humidification. But the last should be applied to the semiconductor and FPD industry, air washer has focused on removing pollutants. In addition, air washer within the clean room remove the pollutants as well as use for humidification in Winter. However, there is no research in the country, and for research purposes, the evaluation was conducted by atomizing water temperature variation and L/G variation. Performance evaluation results are the same conditions as the entrance of air washers (
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