한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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- Pages.471-472
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- 2008
FTS 법으로 제작한 태양전지용 AZO 박막의 투입전류에 따른 특성
Properties of AZO thin flim for solar cells with various input current prepared by FTS method
- Jung, Yu-Sup (Department of Electric Engineering, Kyungwon Univ.) ;
- Kim, Sang-Mo (Department of Electric Engineering, Kyungwon Univ.) ;
- Choi, Myung-Kyu (Department of Electric Engineering, Kyungwon Univ.) ;
- Kim, Kyung-Hwan (Department of Electric Engineering, Kyungwon Univ.)
- 발행 : 2008.06.19
초록
The properties of Al doped ZnO (AZO) thin flim for solar cells with various input currents were studied in this paper. Using facing target sputtering with 2wt.% AZO targets, TCO films were deposited on glass(corning 2948) substrate at room temperature. AZO thin films were deposited by 0.2A, 0.4A, 0.6A and 0.8A at the thickness of 300nm. Electrical, optical and structural of thin films investigated by a Hall effect measurement (Ecopia), an UV-VIS spectrometer(HP) and a X-ray diffractometer (Rigaku). As a results, all thin films showed transmittance about 80%, respectively and resistivity was