한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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- Pages.423-424
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- 2008
대향타겟식 스퍼터링 방법에 의해 PEN 기판위에 성막된 $ZrO_2$ 박막의 공정 특성에 관한 연구
A Study on pricess characteristics of $ZrO_2$ films prepared on poly-ethlene naphthalate by using Facing tagets sputtering system
- 조도현 (대구가톨릭대학교) ;
- 권오정 (대구가톨릭대학교) ;
- 왕태현 (대구가톨릭대학교) ;
- 김지환 (대구가톨릭대학교) ;
- 박승환 (대구가톨릭대학교) ;
-
홍우표
(대구가톨릭대학교)
;
-
김화민
(대구가톨릭대학교)
;
-
김종재
(대구가톨릭대학교)
- Cho, Do-Hyun (Catholic University of Daegu) ;
- Kwon, Oh-Jung (Catholic University of Daegu) ;
- Wang, Tae-Hyun (Catholic University of Daegu) ;
- Kim, Ji-Hwan (Catholic University of Daegu) ;
- Park, Sung-Hwan (Catholic University of Daegu) ;
-
Hong, Woo-Pyo
(Catholic University of Daegu)
;
-
Kim, Hwa-Min
(Catholic University of Daegu)
;
-
Kim, Jong-Jae
(Catholic University of Daegu)
- 발행 : 2008.06.19
초록
A facing target sputtering (FTS) equiment is fabricated and its process characteristics are investigated to search for the possibility of applications to film passivation system for organic light emitting diodes (OLEDs). We report that the FTS system can prepare a high quality