한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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- Pages.82-83
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- 2008
Al doped ZnO 박막 특성에 미치는 증착 온도의 영향
Effects of the substrate temperature on the properties of Al doped ZnO films
- Kim, Yong-Hyun (Korea University) ;
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Seong, Tae-Yeon
(Korea University) ;
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Kim, Won-Mok
(Korea Institute of Science and Technology)
- 발행 : 2008.06.19
초록
AI doped ZnO (AZO) films, and intentionally Zn added AZO (ZAZO) films were prepared on Corning glass by rf magnetron sputtering, and the electrical, optical, and structural properties of the as-deposited films together with the air annealed films were investigated. The resistivity of the AZO films increased with increasing substrate temperature and having minimum resistivity at