Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Combinatorial Approach for Systematic Studies in the Development of Transparent Electrodes

  • Kim, Tae-Won (NanoelectronicsTeam, Gwangju Research Center, Korea Institute of Industrial Technology) ;
  • Kim, Sung-Dae (NanoelectronicsTeam, Gwangju Research Center, Korea Institute of Industrial Technology) ;
  • Heo, Gi-Seok (NanoelectronicsTeam, Gwangju Research Center, Korea Institute of Industrial Technology) ;
  • Lee, Jong-Ho (NanoelectronicsTeam, Gwangju Research Center, Korea Institute of Industrial Technology)
  • Published : 2008.06.19
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Abstract

We have demonstrated the combinatorial synthesis of a variety of transparent conducting oxides using a combinatorial sputter system. The effects of a wide range of Nb or Zn doping rate on the optical and electrical properties of Indium-tin oxides (ITO) films were investigated. The Nb or Zn doped ITO films were fabricated on glass substrates, using combinatorial sputtering system which yields a linear composition spread of Nb or Zn concentration in ITO films in a controlled manner by co-sputtering two targets of ITO and $Nb_2O_5$ or ITO and ZnO. We have examined the work-function, resistivity, and optical properties of the Nb or Zn-doped ITO films. Furthermore, the effects of Hz plasma treatment on the physical properties of Ga or Zn doped ITO films synthesized by combinatorial sputter system were investigated.

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