Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.11a
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- Pages.343-344
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- 2008
Infrared Response Characterization on the Microbolometer Device Design
마이크로볼로미터 소자설계에 따른 적외선 검출특성
- Han, Myung-Soo (Korea Photonics Technology Institute) ;
- Ahn, Su-Chang (Korea Photonics Technology Institute) ;
- Kang, Tai-Young (OCAS Corp.) ;
- Lim, Sung-Soo (OCAS Corp.)
- Published : 2008.11.06
Abstract
A surface micromachined uncooled microbolometer based on the amorphous silicon was designed, fabricated, and characterized. We designed the microbolometer with a pixel size of