Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.11a
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- Pages.200-200
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- 2008
Electrical Characterization of BST Thin Film by IDC pattern
IDC 패턴에 따른 BST 전기적 특성
- Roh, Ji-Hyoung (Korea Univ.) ;
- Kim, Sung-Su (Korea Univ.) ;
- Song, Sang-Woo (Korea Univ.) ;
- Kim, Ji-Hong (Korea Univ.) ;
- Koh, Jung-Hyuk (Kwangwoon Univ.) ;
- Moon, Byung-Moo (Korea Univ.)
- Published : 2008.11.06
Abstract
This paper reports on electrical characterization by IDC pattern using BST