Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.11a
- /
- Pages.13-14
- /
- 2008
Electrical properties of $Al_2O_3$ /GaN MIS capacitor deposited by Remote Plasma ALD
Remote Plasma ALD법으로 제작한 $Al_2O_3$ /GaN MIS 커패시터의 전기적 특성
- Kwak, No-Won (Cheongju University) ;
- Yun, Hyeong-Sun (Cheongju University) ;
- Lee, Woo-Seok (Cheongju University) ;
- Kim, Ka-Lam (Cheongju University) ;
- Kim, Kwang-Ho (Cheongju University)
- Published : 2008.11.06
Abstract