UV경화수지의 고형상비 미세패턴 이형에 관한 연구

A study on releasing high aspect ratio micro features formed with a UV curable resin

  • 권기환 (충남대학교 메카트로닉스학과 대학원) ;
  • 유영은 (한국기계연구원 나노기계연구본부) ;
  • 김창완 (한국기계연구원 나노기계연구본부) ;
  • 박영우 (충남대학교 메카트로닉스 공학과) ;
  • 제태진 (한국기계연구원 나노기계연구본부) ;
  • 최두선 (한국기계연구원 나노기계연구본부)
  • 발행 : 2008.11.05

초록

Recently as the micro surface features become higher and diverse in their shapes, the releasing of the molded features becomes more crucial for manufacturing of the micro patterned products. The higher aspect ratio of the features or more complex shape of the features results in larger releasing force, elongation or cohesive failure of the features during the releasing. Another issue would be the uniformity of the released surface features after molding, especially for applications with large area surface. The micro patterned optical film, one of typical applications for micro surface features, consists of two layers, the thermoplastic base film and the micro formed UV resin layer. Therefore two interfaces are typically involved during the forming of this micro featured film; one is between the base film and the UV resin and another is between the resin and the pattern master. To improve the releasing of the molded surface features, the adhesive characteristic was investigated at these two interfaces. A PET film was used as a base film and two UV curable resins with different surface energy were prepared for different adhesiveness. Also the two different pattern masters were employed; one is made from brass-copper alloy and fabricated with PMMA. The adhesiveness at each interface was measured for some combinations of these base film, UV resins and the masters and the effect of this adhesiveness on the releasing was investigated.

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