한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2008년도 추계학술발표대회 및 제15회 신소재 심포지엄
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- Pages.22.2-22.2
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- 2008
Properties of lanthanum oxide deposited by electron cyclotron resonance atomic layer deposition
- Kang, Byung-Woo (Division of Materials science and engineering, Hanyang university) ;
- Kim, Woong-Sun (Division of Materials science and engineering, Hanyang university) ;
- Moon, Dae-Yong (Division of Materials science and engineering, Hanyang university) ;
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Park, Jong-Wan
(Division of Materials science and engineering, Hanyang university)
- 발행 : 2008.11.07