Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2008.07a
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- Pages.1751-1752
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- 2008
Nonlinearity error compensation in heterodyne laser interferometer using recursive WLS
순환적 WLS를 이용한 헤테로다인 레이저 간섭계의 비선형 오차 보정
- Kim, Dae-Hyun (SungkyunKwan University, School of Information and Communication Engineering) ;
- Heo, Gun-Haeng (SungkyunKwan University, School of Information and Communication Engineering) ;
- You, Kwan-Ho (SungkyunKwan University, School of Information and Communication Engineering)
- Published : 2008.07.16
Abstract
The heterodyne laser interferometer has a nano-meter scale resolution. However, the unwanted nonlinearity error caused from frequency-mixing limits the ultra-precise resolution. In this paper, we propose a recursive WLS algorithm to improve the resolution of heterodyne laser interferometer. Some experimental results show an effectiveness of the recursive WLS algorithm in nano-meter scale resolution.
Keywords