대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2008년도 제39회 하계학술대회
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- Pages.1352-1353
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- 2008
폴리머 기판의 표면개질을 통한 ZnO:Al 투명전도막의 전기적 특성 개선
Electrical property improvement of ZnO:Al transparent conducting oxide thin film as surface treatment of polymer substrate
- 팽성환 (경성대학교 전기전자.메카트로닉스공학부) ;
- 정기영 (경성대학교 전기전자.메카트로닉스공학부) ;
- 박병욱 (경성대학교 전기전자.메카트로닉스공학부) ;
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곽동주
(경성대학교 전기전자.메카트로닉스공학부)
- Paeng, Sung-Hwan (Department of Electrical.Electronics Mechatronics Engineering, Kyungsung University) ;
- Jung, Ki-Young (Department of Electrical.Electronics Mechatronics Engineering, Kyungsung University) ;
- Park, Byung-Wook (Department of Electrical.Electronics Mechatronics Engineering, Kyungsung University) ;
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Kwak, Dong-Joo
(Department of Electrical.Electronics Mechatronics Engineering, Kyungsung University)
- 발행 : 2008.07.16
초록
In this study, aluminium - doped zinc oxide (ZnO:Al) transparent conducting film was deposited on PET(polyethylen terephthalate) substrate by r.f. magnetron sputtering method. PET substrate was surface-treated in an atmospheric pressure DBD(dielectric barrier discharge) plasma to increase deposition rate and to improve electrical propesties. Morphological changes by DBD plasma were obsered using contact angle measurement. The contact angle of water on PET was reduced from 62
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