Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Electrical property improvement of ZnO:Al transparent conducting oxide thin film as surface treatment of polymer substrate

폴리머 기판의 표면개질을 통한 ZnO:Al 투명전도막의 전기적 특성 개선

  • Paeng, Sung-Hwan (Department of Electrical.Electronics Mechatronics Engineering, Kyungsung University) ;
  • Jung, Ki-Young (Department of Electrical.Electronics Mechatronics Engineering, Kyungsung University) ;
  • Park, Byung-Wook (Department of Electrical.Electronics Mechatronics Engineering, Kyungsung University) ;
  • Kwak, Dong-Joo (Department of Electrical.Electronics Mechatronics Engineering, Kyungsung University)
  • 팽성환 (경성대학교 전기전자.메카트로닉스공학부) ;
  • 정기영 (경성대학교 전기전자.메카트로닉스공학부) ;
  • 박병욱 (경성대학교 전기전자.메카트로닉스공학부) ;
  • 곽동주 (경성대학교 전기전자.메카트로닉스공학부)
  • Published : 2008.07.16
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Abstract

In this study, aluminium - doped zinc oxide (ZnO:Al) transparent conducting film was deposited on PET(polyethylen terephthalate) substrate by r.f. magnetron sputtering method. PET substrate was surface-treated in an atmospheric pressure DBD(dielectric barrier discharge) plasma to increase deposition rate and to improve electrical propesties. Morphological changes by DBD plasma were obsered using contact angle measurement. The contact angle of water on PET was reduced from 62$^{\circ}$ to 42$^{\circ}$ by DBD plasma surface treatment. The plasma treatment also increased deposition rate and electrical propesties. The electrical resistivity as low as $4.97{\times}10^{-3}[{\Omega}-cm]$ and the deposition rate of 234[${\AA}$-m/min] were obtained in ZnO:Al film with surface treatment time of 5min, and 20min., respectively.

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