상부전극 접촉면 크기에 따른 PRAM cell의 지우기 전류 특성

Reset current of PRAM cell with top electrode contact size

  • 발행 : 2008.07.16

초록

PRAM(Phase change access memory) has desirable characteristics including high speed, low cost, low power, and simple process. PRAM is based on the reversible phase transition between resistive amorphous and conductive crystalline states of chalcogenide. However, PRAM needs high reset current for operation. PRAM have to reduce reset current for high density and competitiveness. Therefore, we have investigated the reset current of PRAM with top electrode contact hole size using 3-D finite element analysis tool in this paper.

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