한국정보통신학회:학술대회논문집 (Proceedings of the Korean Institute of Information and Commucation Sciences Conference)
- 한국해양정보통신학회 2007년도 추계종합학술대회
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- Pages.196-199
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- 2007
Thermal Improvements for 2.75 GHz-FBAR Devices
- Mai, Linh (Information and Communications University (ICU)) ;
- Lee, Jae-Young (Information and Communications University (ICU)) ;
- Pham, Van-Su (Information and Communications University (ICU)) ;
- Kabir, S. M. Humayun (Information and Communications University (ICU)) ;
- Dong, Hoai-Bac (Posts and Telecommunications Institute of Technology) ;
- Yoon, Gi-Wan (Information and Communications University (ICU))
- 발행 : 2007.10.26
초록
In this paper, we studied a ZnO-based film bulk acoustic wave resonator (FBAR) device fabricated on top of a novel multi-layered Bragg reflector with chromium adhesion layers