Proceedings of the Korea Crystallographic Association Conference (한국결정학회:학술대회논문집)
- 2007.11a
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- Pages.35-35
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- 2007
The enhanced nucleation behavior of atomic-layer-deposited Ru film on porous low-k dielectrics by $UV-O_3$ treatment
- Heo, Jae-Yeong (School of Materials Science & Engineering, Seoul National University) ;
- Lee, Sang-Young (School of Materials Science & Engineering, Seoul National University) ;
- Eom, Da-Il (School of Materials Science & Engineering, Seoul National University) ;
- Park, Sang-Hyun (School of Materials Science & Engineering, Seoul National University) ;
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Hwang, Cheol-Seong
(School of Materials Science & Engineering, Seoul National University)
;
- Kim, Hyeong-Joon (School of Materials Science & Engineering, Seoul National University)
- Published : 2007.11.16
Abstract
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