Proceedings of the Korea Crystallographic Association Conference (한국결정학회:학술대회논문집)

Korean Crystallographic Association (한국결정학회)
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Effect of Thermal Annealing on the Agglomeration Behavior of Ru Thin Films Prepared by Metal-Organic Chemical Vapor Deposition

  • Kim, Beom-Seok (Department of Materials Science & Engineering, Seoul National University) ;
  • Kim, Hyeong-Joon (Department of Materials Science & Engineering, Seoul National University)
  • Published : 2007.11.16
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