Article Info.
Home
Article Info.
Proceedings of the Korean Vacuum Society Conference
(한국진공학회:학술대회논문집)
2007.08a
/
Pages.319-319
/
2007
The Korean Vacuum Society (한국진공학회)
A Study on Development of Discharge Electrode Structure in Magnetron Sputtering System
Lee, Jae-Hui
;
Hwang, Do-Won
;
Son, Yeong-Ho
;
Jeong, Myeong-Hyo
이재희
(경일대학교) ;
황도원
((주)알파플러스) ;
손영호
((주)알파플러스) ;
정명효
((주)알파플러스)
Published : 2007.08.15
PDF
Download PDF
〈 Previous
Next 〉
Abstract
Keywords