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Proceedings of the Korean Vacuum Society Conference
(한국진공학회:학술대회논문집)
2007.08a
/
Pages.262-262
/
2007
The Korean Vacuum Society (한국진공학회)
A study for the hybrid low-k polymer thin films by PECVD and their electrical and mechanical properties
Bae, In-Seop
;
Jo, Sang-Jin
;
Bu, Jin-Hyo
배인섭
(성균관대학교 화학과) ;
조상진
(성균관대학교 화학과) ;
부진효
(성균관대학교 화학과)
Published : 2007.08.15
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