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Proceedings of the Korean Vacuum Society Conference
(한국진공학회:학술대회논문집)
2007.08a
/
Pages.137-137
/
2007
The Korean Vacuum Society (한국진공학회)
Surface modification by low energy ion source with closed drift and extended acceleration region
Park, Dong-Hui
;
Choe, Won-Guk
박동희
(한국과학기술연구원, 재료기술연구본부) ;
최원국
(한국과학기술연구원, 재료기술연구본부)
Published : 2007.08.15
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