Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.08a
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- Pages.98-98
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- 2007
Effect of $12CaO{\cdot}7Al_2O_3thin$ film in reactive gasses by RF magnetron sputtering system
- Tai, Phan Huu (ISKKU Advanced Institute of Nanotechnology(SAINT), Sungkyunkwan University) ;
- Jung, C.H. (ISKKU Advanced Institute of Nanotechnology(SAINT), Sungkyunkwan University) ;
- Kang, Y.K. (School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
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Yoon, D.H.
(ISKKU Advanced Institute of Nanotechnology(SAINT), Sungkyunkwan University, School of Advanced Materials Science and Engineering, Sungkyunkwan University)
- Published : 2007.08.15
Abstract
Keywords