한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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- Pages.403-404
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- 2007
PES 기판상에 증착된 AZO 박막의 특성연구
Properties of AZO thin film deposited on the PES substrate
- Kim, Sang-Mo (Dept. of Electrical Engineering, Kyungwon University) ;
- Rim, You-Seung (Dept. of Electrical Engineering, Kyungwon University) ;
- Choi, Myung-Gyu (Dept. of Electrical Engineering, Kyungwon University) ;
- Kim, Kyung-Hwan (Dept. of Electrical Engineering, Kyungwon University)
- 발행 : 2007.06.21
초록
We prepared the Al doped ZnO (AZO) thin film on polyethersulfon (PES) without any substrate heating by Facing Targets Sputtering (FTS) system. ZnO doped the content of Al 2 wt% was used and the sputtering conditions were gas pressure 1mTorr and input power 100W. The electrical, structural and optical properties of AZO thin films were investigated. To investigate the as-deposited thin film properties, we employed four-point probe, UV/VIS spectrometer, X-ray diffractometer (XRD), scanning electron microscopy (SEM), Hall Effect measurement system and Atomic Force Microscope (AFM).