한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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- Pages.385-386
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- 2007
은전도층이 추가된 AZO 박막 제작
Preparation of AZO thin film adding to Ag layer
- Kim, Sang-Mo (Kyungwon University) ;
- Lee, Ji-Hoon (Kyungwon University) ;
-
Rim, You-Seung
(Kyungwon University)
;
- Son, In-Hwan (Shinsung University) ;
- Keum, Min-Jong (Center for Advanced Plasma Surface Technology) ;
- Kim, Kyung-Hwan (Kyungwon University)
- 발행 : 2007.06.21
초록
We prepared the Al doped ZnO coating Ag multilayer thin films on glass without substrate heating using FTS system. The structure of multilayer thin films has Al doped ZnO/Ag/Al doped ZnO(AZO/Ag/AZO). The thickness of top and bottom AZO thin films were fixed to 50 nm, respectively and controlled the thickness of Ag thin films with deposition time. As-doped multilayer thin films were prepared at 1mTorr and input power (DC) of 100W at room temperature. To investigate the film properties, we employed four-point probe, UVNIS spectrometer, X-ray diffractometer (XRD), scanning electron microscopy (SEM), Hall Effect measurement system and Atomic Force Microscope (AFM).