한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
권호 표지

Growth of carbon nanotubes on metal substrate for electronic devices

  • Ryu, Je-Hwang (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
  • Kim, Ki-Seo (Dept. of Physics and Advanced Display Research Center, Kyung Hee University) ;
  • Lee, Chang-Seok (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
  • Min, Kyung-Woo (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
  • Song, Na-Young (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
  • Jeung, Il-Ok (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
  • Manivannan, S. (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
  • Moon, Jong-Hyun (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
  • Park, Kyu-Chang (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
  • Jang, Jin (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University)
  • Published : 2007.08.27
Download PDF
⟨ Previous Next ⟩

Abstract

We developed a novel growth method of CNTs on metal substrate for device applications, deposited by a triode direct current plasma enhanced chemical vapor deposition (dc-PECVD). With resist-assisted patterning (RAP) method, we had grown CNTs on metal substrate, which were strongly bonded with metal substrate.

Keywords