한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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- Pages.1632-1635
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- 2007
Growth of carbon nanotubes on metal substrate for electronic devices
- Ryu, Je-Hwang (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
- Kim, Ki-Seo (Dept. of Physics and Advanced Display Research Center, Kyung Hee University) ;
- Lee, Chang-Seok (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
- Min, Kyung-Woo (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
- Song, Na-Young (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
- Jeung, Il-Ok (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
- Manivannan, S. (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
- Moon, Jong-Hyun (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
- Park, Kyu-Chang (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
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Jang, Jin
(Dept. of Information Display and Advanced Display Research Center, Kyung Hee University)
- 발행 : 2007.08.27
초록
We developed a novel growth method of CNTs on metal substrate for device applications, deposited by a triode direct current plasma enhanced chemical vapor deposition (dc-PECVD). With resist-assisted patterning (RAP) method, we had grown CNTs on metal substrate, which were strongly bonded with metal substrate.