Characteristics of pentacene transistor using Organic Flow Deposition (OFD) equipment

  • 발행 : 2007.08.27

초록

This paper is concerned on design of organic flow deposition system and development of the deposition process for pentacene thin film by OFD and on electrical characteristics of pentacene films deposited by it. OFD will overcome vacuum thermal evaporator's limits and it will provide a large-scale mass, uniform and good electrical performance.

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