한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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- Pages.1395-1398
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- 2007
Effects of surface geometry of MgO protective layer for AC-PDPs
- Park, Sun-Young (School of Materials Science & Engineering, Seoul National University) ;
- Moon, Sung-Hwan (School of Materials Science & Engineering, Seoul National University, Samsung SDI Corporate R & D Center) ;
- Heo, Tae-Wook (School of Materials Science & Engineering, Seoul National University) ;
- Kim, Jae-Hyuk (School of Materials Science & Engineering, Seoul National University, Samsung SDI Corporate R & D Center) ;
- Lee, Joo-Hwi (School of Materials Science & Engineering, Seoul National University) ;
- Kim, Hyeong-Joon (School of Materials Science & Engineering, Seoul National University, Inter-University Semiconductor Research Center, Seoul National University)
- 발행 : 2007.08.27
초록
MgO thin films were deposited by e-beam evaporator using the 2-step method for alternate current plasma display panels (AC-PDPs). Glancing angle deposition (GLAD) method was employed to produce various surface geometry of the thin film; the bottom layer was deposited on a substrate by normal e-beam evaporation method and the top layer was deposited on bottom layer with
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