한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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- Pages.1333-1335
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- 2007
The electronic structures and the electrical properties of ITO thin films by REELS and c-AFM
- Baik, Min-Kyung (Devices & Materials Laboratory, LG Electronics Institute of Technology) ;
- Joo, Min-Ho (Devices & Materials Laboratory, LG Electronics Institute of Technology) ;
- Choi, Jong-Kwon (Devices & Materials Laboratory, LG Electronics Institute of Technology) ;
- Park, Kyu-Ho (Devices & Materials Laboratory, LG Electronics Institute of Technology) ;
- Sung, Myeon-Chang (Digital Display Research Laboratory, LG Electronics) ;
- Lee, Ho-Nyun (Digital Display Research Laboratory, LG Electronics) ;
- Kim, Hong-Gyu (Digital Display Research Laboratory, LG Electronics)
- 발행 : 2007.08.27
초록
We studied the surface defects and the current distributions of ITO thin films by reflected electron energy loss spectroscopy (REELS) and conductiveatomic force microscope (c-AFM). The ohmic behavior of ITO thin film was observed at