The Study on the experimental of a development of the filtering system for particle/gas phase contaminants

입자/가스상 오염물질 필터링 장치 개발에 관한 실험적 연구

  • 김태형 ((주)신성이엔지 기술연구소) ;
  • 남승백 ((주)신성이엔지 기술연구소) ;
  • 하종필 ((주)신성이엔지 기술연구소) ;
  • 문인호 ((주)신성이엔지 기술연구소) ;
  • 조인수 ((주)신성이엔지 기술연구소)
  • Published : 2007.11.30

Abstract

In this study performance evaluation of filtering system were made on the clean air supply system to show it's ability to eliminate the air contaminants. The evaluation was conducted inside the 3,200CMH scale wind tunnel and under the same environment that is effected by yellow dust and similar particle and gas phase contaminants in semi-conductor and FPDs industries. (1) The result of experimental for particle contaminants, the particle removing efficiency was 40% on condition that the air velocity is 2.5m/s, L/G ratio : 0.05, electrified voltage : (+)5.8kV with electric charger and (-)3.5kV with eliminator. (2) The gas phase removing efficiency for $NH_3$ : 80%, $SO_X$ : 70% and $NO_X$ : 40% on condition that the air velocity is 2.5m/s, L/G ratio : 0.05.

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