Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2007.05b
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- Pages.2182-2187
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- 2007
Predictions of Phonon and Electron Contributions to Thermal Conductivity in Silicon Films with Varying Doping Density
박막 실리콘 내 도핑 농도 변화에 따른 포논과 전자의 열전도율 기여도에 대한 수치해석
- Published : 2007.05.30
Abstract
The relative contributions of phonon and electron to the thermal conductivity of silicon film with varying doping density are evaluated from the modified electron-phonon interaction model, which is applicable to the micro/nanoscale simulation of energy transport between energy carriers. The thermal conductivities of intrinsic silicon layer thicknesses from 20 nm to 500 nm are calculated and extended to the variation in n-type doping densities from 1.0
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