Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2007.05a
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- Pages.28.1-28.1
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- 2007
Effect of $SiO_2$ RF Power and Deposition Time in High-k $TiO_2-SiO_2$ Dielectric Layers
$SiO_2$ RF Power와 증착 시간 변화에 따른 고유전 $TiO_2-SiO_2$ 절연막의 특성
- Published : 2007.05.10