한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 추계학술대회 논문집
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- Pages.444-445
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- 2007
TTS를 이용하여 PEN 기판 상에 성막한 플렉시블 전면 발광 OLED용 IZO/Al multilayer 애노드의 특성
Investigation of IZO/Al multilayer anode grown on PEN substrate by a twin target sputtering system for flexible top emitting organic light emitting diodes
- 오진영 (금오공과대학교, 정보나노소재공학) ;
- 문종민 (금오공과대학교, 정보나노소재공학) ;
- 정진아 (금오공과대학교, 정보나노소재공학) ;
- 김한기 (금오공과대학교, 정보나노소재공학)
- Oh, Jin-Young (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology(KIT)) ;
- Moon, Jong-Min (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology(KIT)) ;
- Jeong, Jin-A (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology(KIT)) ;
- Kim, Han-Ki (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology(KIT))
- 발행 : 2007.11.01
초록
IZO/Al multilayer anode films for flexible top emitting organic light emitting diodes (TOLEDs) were grown on PEN (polyethylen-enaphthelate) substrate using twin target sputter (TTS) system. To investigate electrical and optical properties of IZO/Al multilayer films, 4-point probe method and UV/Vis spectrometer were used, respectively. From a IZO/Al multilayer films with 100nm-thick Al, sheet resistance of