한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 추계학술대회 논문집
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- Pages.442-443
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- 2007
Electrical Properties of P-ZnO:(Al,N) Co-doped ZnO Films Fabricated by RF Magnetron Sputtering
- Jin, Hu-Jie (Wonkwang Univ. School of Electrical Electronic and Information Engineering) ;
- Kim, Deok-Kyu (Cheongju Uni.) ;
- So, Byung-Moon (Iksan National Coll.) ;
- Park, Choon-Bae (Wonkwang Univ. School of Electrical Electronic and Information Engineering)
- 발행 : 2007.11.01
초록
Al-N co-doped ZnO films were fabricated on n-Si (100) and homo-buffer layers in the mixture of oxygen and nitrogen at