Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.11a
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- Pages.165-165
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- 2007
CMP Properties of ITO with the deposition temperature
기판온도에 따른 ITO박막의 CMP특성
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Choi, Gwon-Woo
(Research Institute of Energy Resources Technology, Chosun University) ;
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Lee, Young-Kyun
(Department of Electrical Engineering, Chosun University) ;
- Lee, Woo-Sun (Department of Electrical Engineering, Chosun University) ;
- Jun, Young-Kil (Department of Electrical Engineering, Chosun University) ;
- Ko, Pil-Ju (Department of Electrical Engineering, Chosun University) ;
- Seo, Yong-Jin (Department of Electrical Engineering, Daebul University)
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최권우
(조선대학교 에너지자원신기술연구소) ;
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이영균
(조선대학교 전기공학과) ;
- 이우선 (조선대학교 전기공학과) ;
- 전영길 (조선대학교 전기공학과) ;
- 고필주 (조선대학교 전기공학과) ;
- 서용진 (대불대학교 전기전자공학부)
- Published : 2007.11.01
Abstract
투명전도박막은 ITO,