대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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자기부상 클린 리프트용 마그네트 설계

Magnet Design for Maglev Clean Lift

  • 김종문 (한국전기연구원 계측제어연구그룹)
  • Kim, Jong-Moon (Control and Instrumentation Research Group, Korea Electrotechnology Research Institute)
  • 발행 : 2007.07.18
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초록

In this paper, an electromagnet which is used in maglev(magnetic levitation) clean lift is designed and described. The electromagnet is firstly designed by using FEM(finite element method) tool and the simulation results are presented. The nominal airgap is 5mm and the nominal current is 2A. Also, the nominal magnetic force is 200N. From the results, we can get the electromagnet as an actuator used in maglev(magnetic levitation) clean lift for LCD process.

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