대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2006년도 하계종합학술대회
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- Pages.543-544
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- 2006
Electrical properties of Organic TFT patterned by shadow-mask with all layer
- Lee, Joo-Won (Opto-Electric Materials Research Center, Korea Institute of Science and Technology) ;
- Kim, Jai-Kyeong (Opto-Electric Materials Research Center, Korea Institute of Science and Technology) ;
- Jang, Jin (Dept. of Physics, Kyunghee University) ;
- Ju, Byeong-Kwon (Department of Electrical Engineering, Korea University)
- 발행 : 2006.06.21
초록
Pentacene thin film transistors fabricated without photolithographic patterning were fabricated on the plastic substrates. Both the organic/inorganic thin films and metallic electrode were patterned by shifting the position of the shadow mask which accompanies the substrate throughout the deposition process. By using an optically transparent zirconium oxide (
키워드