Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Surface Acoustic Waves Sensors for Wireless Measurement of Temperature

Surface Acoustic Wave를 이용한 무선 온도 센서 설계 및 구현

  • Kim, Jaek-Won (Dept. of Electronic Engineering and Interdisciplinary Program of Integrated Biotechnology Sogang University) ;
  • Park, Joo-Yong (Dept. of Electronic Engineering and Interdisciplinary Program of Integrated Biotechnology Sogang University) ;
  • Kim, Kyung-Hwan (Dept. of Electronic Engineering and Interdisciplinary Program of Integrated Biotechnology Sogang University) ;
  • Yeo, Joon-Ho (ETRI) ;
  • Burm, Jin-Wook (Dept. of Electronic Engineering and Interdisciplinary Program of Integrated Biotechnology Sogang University)
  • 김재권 (서강대학교 전자공학과 바이오융합기술 협동 과정) ;
  • 박주용 (서강대학교 전자공학과 바이오융합기술 협동 과정) ;
  • 김경환 (서강대학교 전자공학과 바이오융합기술 협동 과정) ;
  • 여준호 (한국전자통신연구원) ;
  • 범진욱 (서강대학교 전자공학과 바이오융합기술 협동 과정)
  • Published : 2006.06.21
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Abstract

Surface Acoustic Wave(SAW) devices can be used to as wireless sensor elements, called SAW transponders, for measuring shysical quantities such as temperature that do not need any power supply and may be accessed wirelessly. SAW devices were fabricated on Y-Z $LiNbO_3$ piezoelectric substrate with a good temperature coefficient property. The signal response of SAW sensor on the temperature change were compared. To measure the change of SAW velocity. Temperature changed form $20^{\circ}C$ to $400^{\circ}C$ was linearly changed, the SAW sensor is application to the temperature sensor.

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