전주공정을 이용한 파인메탈마스크 제작

Fabrication of Fine Metal Mask using Electroforming process

  • 강대철 (강원대학교 기계메카트로닉스공학부 대학원) ;
  • 김헌영 (강원대학교 기계메카트로닉스공학부) ;
  • 전병희 (인덕대학 컴퓨터응용설계)
  • 발행 : 2006.05.11

초록

Electroformed part is widely used in modem manufacturing industries, especially semi-conductor division. It is basically a specialized form of electroplating. So, it has very similar parameters with electroplating. The object of this study is development of the fine metal mask by electroforming process. In this paper considered two parameters. The first is relationship of UV exposure and soft baking time. The other one is thickness uniformity of electroformed parts by distance of between electrodes. This paper presents the fabrication method of fine metal mask by electroforming process.

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