Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2006.02a
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- Pages.191-191
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- 2006
Structure and mechanical characteristics of TiZrAIN nanostructured thin films by CFUBMS
- Kim Youn-J. (Department of Advanced Materials Engineering, SungKyunKwan University) ;
- Lee Ho-Y. (Department of Advanced Materials Engineering, SungKyunKwan University) ;
- Kim Yong-M. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) ;
- Han Jeon-G. (Department of Advanced Materials Engineering, SungKyunKwan University)
- Published : 2006.02.01
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