한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)
- 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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- Pages.60-63
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- 2006
고분자 기판상에 제작한 Al이 첨가된 ZnO 박막에 관한 연구
- 발행 : 2006.10.12
초록
Preparing AZO thin films on the polymer substrate has been widely studied Because AZO thin film has the potential applications. In this study, we prepared AZO thin films on polyethersulfon (PES) at room temperature. The AZO thin films were prepared at
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