한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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- Pages.430-431
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- 2006
엑시머 레이저를 이용한 저온 다결정 실리콘 박막 트랜지스터의 특성
Characteristics of low temperature poly-Si thin film transistor using excimer laser annealing
- Kang, Soo-Hee (Korea Electronics Technology Institute, Yonsei Univ.) ;
- Kim, Yong-Hoon (Korea Electronics Technology Institute) ;
- Han, Jin-Woo (Yonsei Univ.) ;
- Seo, Dae-Shik (Yonsei Univ.) ;
- Han, Jeong-In (Korea Electronics Technology Institute)
- 발행 : 2006.06.22
초록
This letter reports the fabrication of polycrystalline silicon thin-film transistors (poly-Si TFT) on flexible plastic substrates using amorphous silicon (a-Si) precursor films by sputter deposition. The a-Si films were deposited with mixture gas of argon and helium to minimize the argon incorporation into the film. The precursor films were then laser crystallized using XeCl excimer laser irradiation and a four-mask-processed poly-Si TFTs were fabricated with fully self-aligned top gate structure.