Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.06a
- /
- Pages.408-409
- /
- 2006
Growing of polycrystalline 3C-SiC thin films for harsh environment MEMS applications.
극한 환경 MEMS용 다결정 3C-SiC 박막의 성장
- Kim, Kang-San (Univ. of Ulsan) ;
- Chung, Gwiy-Sang (Univ. of Ulsan)
- Published : 2006.06.22
Abstract
The polycrystalline 3C-SiC thin films heteroepitaxially grown by LPCVD method using single precursor 1. 3-disilabutane at