한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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- Pages.406-407
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- 2006
초고온 MEMS용 다결정 3C-SiC의 Ohmic Contact 형성
Ohmic contact formation of polycrystalline 3C-SiC for high-temperature MEMS applications
- Ohn, Chang-Min (Univ. of Ulsan) ;
- Chung, Gwiy-Sang (Univ. of Ulsan)
- 발행 : 2006.06.22
초록
This paper describes the ohmic contact formation between a TiW film as a contact material deposied by RF magnetron sputter and polycrystalline 3C-SiC films deposied on thermally grown Si wafers. The specific contact resistance (